All shifts are given in reference coordinates. 1) Total applied shifts: 1) Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.158, -1.811, -0.075 -58.0, 0.147, -1.760, 0.087 -56.0, 0.142, -1.689, -0.445 -54.0, 0.133, -1.634, -0.276 -52.0, 0.130, -1.542, -0.357 -50.0, 0.120, -1.474, -0.221 -48.0, 0.101, -1.347, -0.170 -46.0, 0.109, -1.321, -0.076 -44.0, 0.101, -1.242, -0.047 -42.0, 0.095, -1.201, 0.017 -40.0, 0.094, -1.117, 0.004 -38.0, 0.087, -1.063, 0.063 -36.0, 0.085, -0.994, 0.070 -34.0, 0.079, -0.945, 0.135 -32.0, 0.071, -0.906, 0.155 -30.0, 0.067, -0.861, 0.225 -28.0, 0.064, -0.821, 0.314 -26.0, 0.057, -0.770, 0.352 -24.0, 0.052, -0.709, 0.366 -22.0, 0.049, -0.670, 0.376 -20.0, 0.050, -0.591, 0.404 -18.0, 0.044, -0.556, 0.413 -16.0, 0.033, -0.486, 0.358 -14.0, 0.030, -0.453, 0.368 -12.0, 0.029, -0.366, 0.429 -10.0, 0.027, -0.338, 0.440 -8.0, 0.022, -0.325, 0.412 -6.0, 0.018, -0.266, 0.437 -4.0, 0.007, -0.267, 0.211 -2.0, 0.009, -0.218, 0.373 -0.0, 0.013, -0.153, 0.333 0.0, 0.040, -0.116, 0.433 2.0, 0.042, -0.127, 0.406 4.0, 0.040, -0.150, 0.407 6.0, 0.034, -0.102, 0.376 8.0, 0.033, -0.091, 0.345 10.0, 0.039, -0.102, 0.383 12.0, 0.038, -0.175, 0.377 14.0, 0.026, -0.079, 0.341 16.0, 0.025, -0.121, 0.327 18.0, 0.030, -0.079, 0.430 20.0, 0.029, -0.110, 0.408 22.0, 0.025, -0.105, 0.343 24.0, 0.025, -0.161, 0.362 26.0, 0.023, -0.133, 0.338 28.0, 0.023, -0.143, 0.326 30.0, 0.016, -0.140, 0.462 32.0, 0.004, -0.206, 0.497 34.0, 0.008, -0.184, 0.454 36.0, -0.010, -0.236, 0.459 38.0, -0.011, -0.218, 0.492 40.0, -0.034, -0.267, 0.465 42.0, -0.007, -0.262, 0.575 44.0, -0.015, -0.341, 0.614 46.0, -0.003, -0.300, 0.591 48.0, -0.015, -0.337, 0.618 50.0, 0.005, -0.338, 0.694 52.0, -0.002, -0.398, 0.756 54.0, 0.010, -0.396, 0.833 56.0, 0.000, -0.423, 0.873 58.0, 0.017, -0.417, 1.057 60.0, 0.004, -0.425, 0.941 2)Unpredicted shifts applied by tracking and focusing or manual interaction Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.042, -0.396, 2.074 -58.0, 0.042, -0.396, 2.074 -56.0, 0.047, -0.374, 1.353 -54.0, 0.047, -0.374, 1.353 -52.0, 0.054, -0.345, 1.134 -50.0, 0.054, -0.345, 1.134 -48.0, 0.026, -0.244, 1.091 -46.0, 0.026, -0.244, 1.091 -44.0, 0.016, -0.199, 1.041 -42.0, 0.016, -0.199, 1.041 -40.0, 0.020, -0.156, 0.963 -38.0, 0.020, -0.156, 0.963 -36.0, 0.026, -0.151, 0.911 -34.0, 0.026, -0.151, 0.911 -32.0, 0.020, -0.166, 0.861 -30.0, 0.020, -0.166, 0.861 -28.0, 0.025, -0.177, 0.911 -26.0, 0.025, -0.177, 0.911 -24.0, 0.024, -0.173, 0.901 -22.0, 0.024, -0.173, 0.901 -20.0, 0.027, -0.135, 0.919 -18.0, 0.027, -0.135, 0.919 -16.0, 0.022, -0.092, 0.855 -14.0, 0.022, -0.092, 0.855 -12.0, 0.023, -0.036, 0.904 -10.0, 0.023, -0.036, 0.904 -8.0, 0.022, -0.083, 0.850 -6.0, 0.022, -0.083, 0.850 -4.0, 0.012, -0.145, 0.530 -2.0, 0.012, -0.145, 0.530 -0.0, 0.013, -0.153, 0.333 0.0, 0.040, -0.116, 0.433 2.0, 0.043, -0.127, 0.404 4.0, 0.043, -0.127, 0.404 6.0, 0.039, -0.098, 0.387 8.0, 0.039, -0.098, 0.387 10.0, 0.047, -0.154, 0.456 12.0, 0.047, -0.154, 0.456 14.0, 0.036, -0.034, 0.425 16.0, 0.036, -0.034, 0.425 18.0, 0.043, -0.014, 0.551 20.0, 0.043, -0.014, 0.551 22.0, 0.039, 0.002, 0.467 24.0, 0.039, 0.002, 0.467 26.0, 0.037, 0.029, 0.439 28.0, 0.037, 0.029, 0.439 30.0, 0.030, 0.021, 0.587 32.0, 0.030, 0.021, 0.587 34.0, 0.047, 0.089, 0.509 36.0, 0.047, 0.089, 0.509 38.0, 0.070, 0.125, 0.569 40.0, 0.070, 0.125, 0.569 42.0, 0.105, 0.165, 0.640 44.0, 0.105, 0.165, 0.640 46.0, 0.126, 0.217, 0.584 48.0, 0.126, 0.217, 0.584 50.0, 0.157, 0.207, 0.634 52.0, 0.157, 0.207, 0.634 54.0, 0.180, 0.186, 0.668 56.0, 0.180, 0.186, 0.668 58.0, 0.204, 0.199, 0.850 60.0, 0.204, 0.199, 0.850 3)detailed shifts that are applied by tracking at each tilt angle Angle[°], Tr. Before dX[µm], Tr. Before dY[µm], Tr. After dX[µm], Tr. After dY[µm] -60.0, 0.000, 0.000, 0.000, 0.000 -58.0, -0.005, -0.022, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000, 0.000 -54.0, -0.007, -0.029, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000, 0.000 -50.0, 0.028, -0.101, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000, 0.000 -46.0, 0.010, -0.045, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000, 0.000 -42.0, -0.004, -0.043, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000, 0.000 -38.0, -0.005, -0.005, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000, 0.000 -34.0, 0.005, 0.016, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000, 0.000 -30.0, -0.005, 0.011, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000, 0.000 -26.0, 0.001, -0.004, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000, 0.000 -22.0, -0.003, -0.038, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000, 0.000 -18.0, 0.005, -0.043, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000, 0.000 -14.0, -0.001, -0.056, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000, 0.000 -10.0, 0.001, 0.047, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000, 0.000 -6.0, 0.010, 0.062, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000, 0.000 -2.0, -0.001, 0.008, 0.000, 0.000 -0.0, 0.013, -0.153, 0.000, 0.000 0.0, 0.040, -0.116, 0.000, 0.000 2.0, 0.003, -0.012, 0.000, 0.000 4.0, 0.000, 0.000, 0.000, 0.000 6.0, -0.004, 0.029, 0.000, 0.000 8.0, 0.000, 0.000, 0.000, 0.000 10.0, 0.008, -0.056, 0.000, 0.000 12.0, 0.000, 0.000, 0.000, 0.000 14.0, -0.011, 0.120, 0.000, 0.000 16.0, 0.000, 0.000, 0.000, 0.000 18.0, 0.006, 0.020, 0.000, 0.000 20.0, 0.000, 0.000, 0.000, 0.000 22.0, -0.004, 0.016, 0.000, 0.000 24.0, 0.000, 0.000, 0.000, 0.000 26.0, -0.002, 0.027, 0.000, 0.000 28.0, 0.000, 0.000, 0.000, 0.000 30.0, -0.007, -0.008, 0.000, 0.000 32.0, 0.000, 0.000, 0.000, 0.000 34.0, 0.017, 0.068, 0.000, 0.000 36.0, 0.000, 0.000, 0.000, 0.000 38.0, 0.023, 0.036, 0.000, 0.000 40.0, 0.000, 0.000, 0.000, 0.000 42.0, 0.036, 0.040, 0.000, 0.000 44.0, 0.000, 0.000, 0.000, 0.000 46.0, 0.021, 0.052, 0.000, 0.000 48.0, 0.000, 0.000, 0.000, 0.000 50.0, 0.031, -0.010, 0.000, 0.000 52.0, 0.000, 0.000, 0.000, 0.000 54.0, 0.023, -0.021, 0.000, 0.000 56.0, 0.000, 0.000, 0.000, 0.000 58.0, 0.024, 0.013, 0.000, 0.000 60.0, 0.000, 0.000, 0.000, 0.000 4)Drifts measured by auto focus method (if applicable) 4)Note: Accuracy is very limited! Use drift auto function for higher accuracy. Angle[°], drift dX[nm/s], drift dY[nm/s], Total[nm/s] -60.0, 0.000, 0.000, 0.000 -58.0, 0.000, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000 -54.0, 0.000, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000 -50.0, 0.000, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000 -46.0, 0.000, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000 -42.0, 0.000, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000 -38.0, 0.000, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000 -34.0, 0.000, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000 -30.0, 0.000, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000 -26.0, 0.000, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000 -22.0, 0.000, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000 -18.0, 0.000, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000 -14.0, 0.000, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000 -10.0, 0.000, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000 -6.0, 0.000, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000 -2.0, 0.000, 0.000, 0.000 -0.0, 0.000, 0.000, 0.000 0.0, 0.000, 0.000, 0.000 2.0, 0.000, 0.000, 0.000 4.0, 0.000, 0.000, 0.000 6.0, 0.000, 0.000, 0.000 8.0, 0.000, 0.000, 0.000 10.0, 0.000, 0.000, 0.000 12.0, 0.000, 0.000, 0.000 14.0, 0.000, 0.000, 0.000 16.0, 0.000, 0.000, 0.000 18.0, 0.000, 0.000, 0.000 20.0, 0.000, 0.000, 0.000 22.0, 0.000, 0.000, 0.000 24.0, 0.000, 0.000, 0.000 26.0, 0.000, 0.000, 0.000 28.0, 0.000, 0.000, 0.000 30.0, 0.000, 0.000, 0.000 32.0, 0.000, 0.000, 0.000 34.0, 0.000, 0.000, 0.000 36.0, 0.000, 0.000, 0.000 38.0, 0.000, 0.000, 0.000 40.0, 0.000, 0.000, 0.000 42.0, 0.000, 0.000, 0.000 44.0, 0.000, 0.000, 0.000 46.0, 0.000, 0.000, 0.000 48.0, 0.000, 0.000, 0.000 50.0, 0.000, 0.000, 0.000 52.0, 0.000, 0.000, 0.000 54.0, 0.000, 0.000, 0.000 56.0, 0.000, 0.000, 0.000 58.0, 0.000, 0.000, 0.000 60.0, 0.000, 0.000, 0.000