All shifts are given in reference coordinates. 1) Total applied shifts: 1) Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.128, -1.415, -0.583 -58.0, 0.116, -1.364, -0.421 -56.0, 0.110, -1.303, 0.493 -54.0, 0.101, -1.248, 0.661 -52.0, 0.096, -1.177, -0.170 -50.0, 0.086, -1.110, -0.034 -48.0, 0.071, -1.012, 0.817 -46.0, 0.079, -0.986, 0.911 -44.0, 0.071, -0.940, 0.121 -42.0, 0.065, -0.899, 0.186 -40.0, 0.065, -0.839, 0.261 -38.0, 0.058, -0.778, 0.320 -36.0, 0.057, -0.747, 0.325 -34.0, 0.052, -0.694, 0.390 -32.0, 0.041, -0.691, 0.371 -30.0, 0.037, -0.638, 0.442 -28.0, 0.043, -0.619, 0.518 -26.0, 0.036, -0.575, 0.556 -24.0, 0.029, -0.572, 0.530 -22.0, 0.026, -0.530, 0.540 -20.0, 0.030, -0.472, 0.556 -18.0, 0.024, -0.443, 0.565 -16.0, 0.018, -0.397, 0.544 -14.0, 0.014, -0.371, 0.554 -12.0, 0.011, -0.312, 0.526 -10.0, 0.009, -0.279, 0.538 -8.0, 0.013, -0.303, 0.554 -6.0, 0.009, -0.244, 0.580 -4.0, 0.001, -0.290, 0.232 -2.0, 0.004, -0.237, 0.393 -0.0, 0.005, -0.187, 1.080 0.0, 0.011, -0.146, 1.236 2.0, 0.010, -0.165, 0.477 4.0, 0.008, -0.185, 0.478 6.0, 0.006, -0.190, 0.558 8.0, 0.005, -0.157, 0.527 10.0, 0.001, -0.227, 0.602 12.0, -0.001, -0.259, 0.597 14.0, -0.007, -0.229, 0.544 16.0, -0.008, -0.240, 0.530 18.0, -0.006, -0.273, 0.543 20.0, -0.007, -0.274, 0.520 22.0, -0.009, -0.319, 0.601 24.0, -0.008, -0.352, 0.620 26.0, -0.015, -0.372, 0.656 28.0, -0.015, -0.361, 0.644 30.0, -0.015, -0.397, 0.739 32.0, -0.028, -0.464, 0.775 34.0, -0.027, -0.473, 0.774 36.0, -0.045, -0.513, 0.778 38.0, -0.050, -0.526, 0.873 40.0, -0.073, -0.564, 0.846 42.0, -0.049, -0.586, 0.910 44.0, -0.057, -0.640, 0.949 46.0, -0.048, -0.632, 0.986 48.0, -0.060, -0.648, 1.013 50.0, -0.034, -0.700, 1.076 52.0, -0.040, -0.738, 1.138 54.0, -0.026, -0.763, 1.276 56.0, -0.036, -0.772, 1.316 58.0, -0.016, -0.788, 1.420 60.0, -0.029, -0.784, 1.304 2)Unpredicted shifts applied by tracking and focusing or manual interaction Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.012, 0.000, 1.566 -58.0, 0.012, 0.000, 1.566 -56.0, 0.015, 0.012, 2.289 -54.0, 0.015, 0.012, 2.289 -52.0, 0.020, 0.020, 1.320 -50.0, 0.020, 0.020, 1.320 -48.0, -0.004, 0.092, 2.078 -46.0, -0.004, 0.092, 2.078 -44.0, -0.014, 0.103, 1.208 -42.0, -0.014, 0.103, 1.208 -40.0, -0.008, 0.122, 1.219 -38.0, -0.008, 0.122, 1.219 -36.0, -0.002, 0.100, 1.165 -34.0, -0.002, 0.100, 1.165 -32.0, -0.010, 0.057, 1.076 -30.0, -0.010, 0.057, 1.076 -28.0, 0.004, 0.018, 1.114 -26.0, 0.004, 0.018, 1.114 -24.0, 0.001, -0.026, 1.065 -22.0, 0.001, -0.026, 1.065 -20.0, 0.007, -0.020, 1.070 -18.0, 0.007, -0.020, 1.070 -16.0, 0.006, -0.002, 1.040 -14.0, 0.006, -0.002, 1.040 -12.0, 0.005, 0.017, 1.001 -10.0, 0.005, 0.017, 1.001 -8.0, 0.014, -0.061, 0.991 -6.0, 0.014, -0.061, 0.991 -4.0, 0.007, -0.168, 0.549 -2.0, 0.007, -0.168, 0.549 -0.0, 0.005, -0.187, 1.080 0.0, 0.011, -0.146, 1.236 2.0, 0.012, -0.163, 0.475 4.0, 0.012, -0.163, 0.475 6.0, 0.011, -0.173, 0.569 8.0, 0.011, -0.173, 0.569 10.0, 0.009, -0.258, 0.676 12.0, 0.009, -0.258, 0.676 14.0, 0.004, -0.167, 0.628 16.0, 0.004, -0.167, 0.628 18.0, 0.007, -0.185, 0.663 20.0, 0.007, -0.185, 0.663 22.0, 0.005, -0.196, 0.725 24.0, 0.005, -0.196, 0.725 26.0, -0.002, -0.199, 0.757 28.0, -0.002, -0.199, 0.757 30.0, -0.001, -0.238, 0.865 32.0, -0.001, -0.238, 0.865 34.0, 0.012, -0.199, 0.828 36.0, 0.012, -0.199, 0.828 38.0, 0.030, -0.178, 0.950 40.0, 0.030, -0.178, 0.950 42.0, 0.063, -0.147, 0.975 44.0, 0.063, -0.147, 0.975 46.0, 0.081, -0.105, 0.980 48.0, 0.081, -0.105, 0.980 50.0, 0.118, -0.142, 1.016 52.0, 0.118, -0.142, 1.016 54.0, 0.144, -0.172, 1.111 56.0, 0.144, -0.172, 1.111 58.0, 0.171, -0.160, 1.214 60.0, 0.171, -0.160, 1.214 3)detailed shifts that are applied by tracking at each tilt angle Angle[°], Tr. Before dX[µm], Tr. Before dY[µm], Tr. After dX[µm], Tr. After dY[µm] -60.0, 0.000, 0.000, 0.000, 0.000 -58.0, -0.003, -0.012, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000, 0.000 -54.0, -0.005, -0.008, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000, 0.000 -50.0, 0.023, -0.072, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000, 0.000 -46.0, 0.010, -0.012, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000, 0.000 -42.0, -0.005, -0.018, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000, 0.000 -38.0, -0.007, 0.022, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000, 0.000 -34.0, 0.008, 0.043, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000, 0.000 -30.0, -0.013, 0.039, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000, 0.000 -26.0, 0.003, 0.044, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000, 0.000 -22.0, -0.006, -0.006, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000, 0.000 -18.0, 0.001, -0.018, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000, 0.000 -14.0, 0.001, -0.019, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000, 0.000 -10.0, -0.009, 0.078, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000, 0.000 -6.0, 0.007, 0.107, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000, 0.000 -2.0, 0.001, 0.019, 0.000, 0.000 -0.0, 0.005, -0.187, 0.000, 0.000 0.0, 0.011, -0.146, 0.000, 0.000 2.0, 0.001, -0.016, 0.000, 0.000 4.0, 0.000, 0.000, 0.000, 0.000 6.0, -0.000, -0.011, 0.000, 0.000 8.0, 0.000, 0.000, 0.000, 0.000 10.0, -0.002, -0.085, 0.000, 0.000 12.0, 0.000, 0.000, 0.000, 0.000 14.0, -0.005, 0.092, 0.000, 0.000 16.0, 0.000, 0.000, 0.000, 0.000 18.0, 0.003, -0.018, 0.000, 0.000 20.0, 0.000, 0.000, 0.000, 0.000 22.0, -0.002, -0.011, 0.000, 0.000 24.0, 0.000, 0.000, 0.000, 0.000 26.0, -0.007, -0.003, 0.000, 0.000 28.0, 0.000, 0.000, 0.000, 0.000 30.0, 0.000, -0.039, 0.000, 0.000 32.0, 0.000, 0.000, 0.000, 0.000 34.0, 0.014, 0.038, 0.000, 0.000 36.0, 0.000, 0.000, 0.000, 0.000 38.0, 0.018, 0.021, 0.000, 0.000 40.0, 0.000, 0.000, 0.000, 0.000 42.0, 0.032, 0.032, 0.000, 0.000 44.0, 0.000, 0.000, 0.000, 0.000 46.0, 0.019, 0.041, 0.000, 0.000 48.0, 0.000, 0.000, 0.000, 0.000 50.0, 0.037, -0.037, 0.000, 0.000 52.0, 0.000, 0.000, 0.000, 0.000 54.0, 0.026, -0.029, 0.000, 0.000 56.0, 0.000, 0.000, 0.000, 0.000 58.0, 0.027, 0.012, 0.000, 0.000 60.0, 0.000, 0.000, 0.000, 0.000 4)Drifts measured by auto focus method (if applicable) 4)Note: Accuracy is very limited! Use drift auto function for higher accuracy. Angle[°], drift dX[nm/s], drift dY[nm/s], Total[nm/s] -60.0, 0.000, 0.000, 0.000 -58.0, 0.000, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000 -54.0, 0.000, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000 -50.0, 0.000, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000 -46.0, 0.000, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000 -42.0, 0.000, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000 -38.0, 0.000, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000 -34.0, 0.000, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000 -30.0, 0.000, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000 -26.0, 0.000, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000 -22.0, 0.000, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000 -18.0, 0.000, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000 -14.0, 0.000, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000 -10.0, 0.000, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000 -6.0, 0.000, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000 -2.0, 0.000, 0.000, 0.000 -0.0, 0.000, 0.000, 0.000 0.0, 0.000, 0.000, 0.000 2.0, 0.000, 0.000, 0.000 4.0, 0.000, 0.000, 0.000 6.0, 0.000, 0.000, 0.000 8.0, 0.000, 0.000, 0.000 10.0, 0.000, 0.000, 0.000 12.0, 0.000, 0.000, 0.000 14.0, 0.000, 0.000, 0.000 16.0, 0.000, 0.000, 0.000 18.0, 0.000, 0.000, 0.000 20.0, 0.000, 0.000, 0.000 22.0, 0.000, 0.000, 0.000 24.0, 0.000, 0.000, 0.000 26.0, 0.000, 0.000, 0.000 28.0, 0.000, 0.000, 0.000 30.0, 0.000, 0.000, 0.000 32.0, 0.000, 0.000, 0.000 34.0, 0.000, 0.000, 0.000 36.0, 0.000, 0.000, 0.000 38.0, 0.000, 0.000, 0.000 40.0, 0.000, 0.000, 0.000 42.0, 0.000, 0.000, 0.000 44.0, 0.000, 0.000, 0.000 46.0, 0.000, 0.000, 0.000 48.0, 0.000, 0.000, 0.000 50.0, 0.000, 0.000, 0.000 52.0, 0.000, 0.000, 0.000 54.0, 0.000, 0.000, 0.000 56.0, 0.000, 0.000, 0.000 58.0, 0.000, 0.000, 0.000 60.0, 0.000, 0.000, 0.000