All shifts are given in reference coordinates. 1) Total applied shifts: 1) Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.133, -1.286, 0.163 -58.0, 0.122, -1.235, 0.325 -56.0, 0.118, -1.189, -0.455 -54.0, 0.109, -1.134, -0.287 -52.0, 0.109, -1.058, 0.601 -50.0, 0.099, -0.990, 0.737 -48.0, 0.076, -0.904, -0.200 -46.0, 0.084, -0.878, -0.106 -44.0, 0.083, -0.824, 0.844 -42.0, 0.078, -0.774, 0.908 -40.0, 0.081, -0.733, -0.760 -38.0, 0.074, -0.680, -0.701 -36.0, 0.072, -0.666, 0.271 -34.0, 0.066, -0.613, 0.336 -32.0, 0.062, -0.605, 0.354 -30.0, 0.058, -0.556, 0.425 -28.0, 0.060, -0.561, 0.342 -26.0, 0.052, -0.511, 0.379 -24.0, 0.045, -0.517, 0.453 -22.0, 0.043, -0.475, 0.463 -20.0, 0.042, -0.430, 0.510 -18.0, 0.036, -0.389, 0.519 -16.0, 0.024, -0.349, 0.604 -14.0, 0.021, -0.319, 0.614 -12.0, 0.020, -0.274, 0.365 -10.0, 0.018, -0.245, 0.377 -8.0, 0.020, -0.264, 1.024 -6.0, 0.016, -0.204, 1.049 -4.0, 0.004, -0.270, 0.169 -2.0, 0.006, -0.217, 0.330 -0.0, 0.012, -0.182, 1.118 0.0, 0.033, -0.128, 1.174 2.0, 0.031, -0.160, 0.215 4.0, 0.029, -0.186, 0.217 6.0, 0.024, -0.185, 0.467 8.0, 0.022, -0.175, 0.436 10.0, 0.021, -0.238, 0.519 12.0, 0.019, -0.299, 0.514 14.0, 0.025, -0.263, 0.362 16.0, 0.023, -0.300, 0.348 18.0, 0.023, -0.294, 0.363 20.0, 0.022, -0.315, 0.340 22.0, 0.022, -0.363, 0.400 24.0, 0.022, -0.410, 0.419 26.0, 0.020, -0.426, 0.594 28.0, 0.020, -0.441, 0.582 30.0, 0.004, -0.479, 0.607 32.0, -0.009, -0.544, 0.642 34.0, -0.006, -0.558, 0.713 36.0, -0.024, -0.608, 0.717 38.0, -0.021, -0.613, 0.798 40.0, -0.044, -0.662, 0.771 42.0, -0.020, -0.674, 0.783 44.0, -0.028, -0.751, 0.822 46.0, -0.011, -0.731, 0.940 48.0, -0.022, -0.771, 0.967 50.0, -0.011, -0.809, 1.102 52.0, -0.017, -0.869, 1.164 54.0, -0.001, -0.889, 1.178 56.0, -0.010, -0.914, 1.218 58.0, 0.004, -0.937, 1.366 60.0, -0.009, -0.946, 1.250 2)Unpredicted shifts applied by tracking and focusing or manual interaction Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm] -60.0, 0.018, 0.130, 2.313 -58.0, 0.018, 0.130, 2.313 -56.0, 0.023, 0.126, 1.343 -54.0, 0.023, 0.126, 1.343 -52.0, 0.033, 0.139, 2.092 -50.0, 0.033, 0.139, 2.092 -48.0, 0.001, 0.200, 1.062 -46.0, 0.001, 0.200, 1.062 -44.0, -0.001, 0.220, 1.932 -42.0, -0.001, 0.220, 1.932 -40.0, 0.007, 0.221, 0.200 -38.0, 0.007, 0.221, 0.200 -36.0, 0.013, 0.188, 1.112 -34.0, 0.013, 0.188, 1.112 -32.0, 0.012, 0.132, 1.060 -30.0, 0.012, 0.132, 1.060 -28.0, 0.020, 0.077, 0.939 -26.0, 0.020, 0.077, 0.939 -24.0, 0.018, 0.029, 0.989 -22.0, 0.018, 0.029, 0.989 -20.0, 0.019, 0.032, 1.026 -18.0, 0.019, 0.032, 1.026 -16.0, 0.013, 0.044, 1.101 -14.0, 0.013, 0.044, 1.101 -12.0, 0.014, 0.051, 0.841 -10.0, 0.014, 0.051, 0.841 -8.0, 0.021, -0.021, 1.462 -6.0, 0.021, -0.021, 1.462 -4.0, 0.009, -0.147, 0.488 -2.0, 0.009, -0.147, 0.488 -0.0, 0.012, -0.182, 1.118 0.0, 0.033, -0.128, 1.174 2.0, 0.033, -0.164, 0.213 4.0, 0.033, -0.164, 0.213 6.0, 0.029, -0.177, 0.479 8.0, 0.029, -0.177, 0.479 10.0, 0.029, -0.283, 0.593 12.0, 0.029, -0.283, 0.593 14.0, 0.035, -0.213, 0.446 16.0, 0.035, -0.213, 0.446 18.0, 0.035, -0.217, 0.484 20.0, 0.035, -0.217, 0.484 22.0, 0.035, -0.253, 0.524 24.0, 0.035, -0.253, 0.524 26.0, 0.034, -0.263, 0.695 28.0, 0.034, -0.263, 0.695 30.0, 0.018, -0.317, 0.732 32.0, 0.018, -0.317, 0.732 34.0, 0.034, -0.283, 0.768 36.0, 0.034, -0.283, 0.768 38.0, 0.060, -0.269, 0.875 40.0, 0.060, -0.269, 0.875 42.0, 0.092, -0.250, 0.847 44.0, 0.092, -0.250, 0.847 46.0, 0.119, -0.217, 0.933 48.0, 0.119, -0.217, 0.933 50.0, 0.141, -0.264, 1.042 52.0, 0.141, -0.264, 1.042 54.0, 0.170, -0.308, 1.013 56.0, 0.170, -0.308, 1.013 58.0, 0.191, -0.321, 1.159 60.0, 0.191, -0.321, 1.159 3)detailed shifts that are applied by tracking at each tilt angle Angle[°], Tr. Before dX[µm], Tr. Before dY[µm], Tr. After dX[µm], Tr. After dY[µm] -60.0, 0.000, 0.000, 0.000, 0.000 -58.0, -0.005, 0.004, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000, 0.000 -54.0, -0.010, -0.013, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000, 0.000 -50.0, 0.032, -0.060, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000, 0.000 -46.0, 0.002, -0.021, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000, 0.000 -42.0, -0.008, -0.001, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000, 0.000 -38.0, -0.005, 0.033, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000, 0.000 -34.0, 0.001, 0.056, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000, 0.000 -30.0, -0.008, 0.055, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000, 0.000 -26.0, 0.003, 0.048, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000, 0.000 -22.0, -0.001, -0.003, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000, 0.000 -18.0, 0.006, -0.011, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000, 0.000 -14.0, -0.001, -0.007, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000, 0.000 -10.0, -0.007, 0.072, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000, 0.000 -6.0, 0.012, 0.126, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000, 0.000 -2.0, -0.003, 0.035, 0.000, 0.000 -0.0, 0.012, -0.182, 0.000, 0.000 0.0, 0.033, -0.128, 0.000, 0.000 2.0, 0.000, -0.036, 0.000, 0.000 4.0, 0.000, 0.000, 0.000, 0.000 6.0, -0.004, -0.013, 0.000, 0.000 8.0, 0.000, 0.000, 0.000, 0.000 10.0, 0.000, -0.106, 0.000, 0.000 12.0, 0.000, 0.000, 0.000, 0.000 14.0, 0.006, 0.071, 0.000, 0.000 16.0, 0.000, 0.000, 0.000, 0.000 18.0, 0.000, -0.005, 0.000, 0.000 20.0, 0.000, 0.000, 0.000, 0.000 22.0, -0.000, -0.036, 0.000, 0.000 24.0, 0.000, 0.000, 0.000, 0.000 26.0, -0.002, -0.009, 0.000, 0.000 28.0, 0.000, 0.000, 0.000, 0.000 30.0, -0.016, -0.055, 0.000, 0.000 32.0, 0.000, 0.000, 0.000, 0.000 34.0, 0.016, 0.034, 0.000, 0.000 36.0, 0.000, 0.000, 0.000, 0.000 38.0, 0.026, 0.014, 0.000, 0.000 40.0, 0.000, 0.000, 0.000, 0.000 42.0, 0.032, 0.019, 0.000, 0.000 44.0, 0.000, 0.000, 0.000, 0.000 46.0, 0.027, 0.033, 0.000, 0.000 48.0, 0.000, 0.000, 0.000, 0.000 50.0, 0.022, -0.047, 0.000, 0.000 52.0, 0.000, 0.000, 0.000, 0.000 54.0, 0.028, -0.044, 0.000, 0.000 56.0, 0.000, 0.000, 0.000, 0.000 58.0, 0.021, -0.014, 0.000, 0.000 60.0, 0.000, 0.000, 0.000, 0.000 4)Drifts measured by auto focus method (if applicable) 4)Note: Accuracy is very limited! Use drift auto function for higher accuracy. Angle[°], drift dX[nm/s], drift dY[nm/s], Total[nm/s] -60.0, 0.000, 0.000, 0.000 -58.0, 0.000, 0.000, 0.000 -56.0, 0.000, 0.000, 0.000 -54.0, 0.000, 0.000, 0.000 -52.0, 0.000, 0.000, 0.000 -50.0, 0.000, 0.000, 0.000 -48.0, 0.000, 0.000, 0.000 -46.0, 0.000, 0.000, 0.000 -44.0, 0.000, 0.000, 0.000 -42.0, 0.000, 0.000, 0.000 -40.0, 0.000, 0.000, 0.000 -38.0, 0.000, 0.000, 0.000 -36.0, 0.000, 0.000, 0.000 -34.0, 0.000, 0.000, 0.000 -32.0, 0.000, 0.000, 0.000 -30.0, 0.000, 0.000, 0.000 -28.0, 0.000, 0.000, 0.000 -26.0, 0.000, 0.000, 0.000 -24.0, 0.000, 0.000, 0.000 -22.0, 0.000, 0.000, 0.000 -20.0, 0.000, 0.000, 0.000 -18.0, 0.000, 0.000, 0.000 -16.0, 0.000, 0.000, 0.000 -14.0, 0.000, 0.000, 0.000 -12.0, 0.000, 0.000, 0.000 -10.0, 0.000, 0.000, 0.000 -8.0, 0.000, 0.000, 0.000 -6.0, 0.000, 0.000, 0.000 -4.0, 0.000, 0.000, 0.000 -2.0, 0.000, 0.000, 0.000 -0.0, 0.000, 0.000, 0.000 0.0, 0.000, 0.000, 0.000 2.0, 0.000, 0.000, 0.000 4.0, 0.000, 0.000, 0.000 6.0, 0.000, 0.000, 0.000 8.0, 0.000, 0.000, 0.000 10.0, 0.000, 0.000, 0.000 12.0, 0.000, 0.000, 0.000 14.0, 0.000, 0.000, 0.000 16.0, 0.000, 0.000, 0.000 18.0, 0.000, 0.000, 0.000 20.0, 0.000, 0.000, 0.000 22.0, 0.000, 0.000, 0.000 24.0, 0.000, 0.000, 0.000 26.0, 0.000, 0.000, 0.000 28.0, 0.000, 0.000, 0.000 30.0, 0.000, 0.000, 0.000 32.0, 0.000, 0.000, 0.000 34.0, 0.000, 0.000, 0.000 36.0, 0.000, 0.000, 0.000 38.0, 0.000, 0.000, 0.000 40.0, 0.000, 0.000, 0.000 42.0, 0.000, 0.000, 0.000 44.0, 0.000, 0.000, 0.000 46.0, 0.000, 0.000, 0.000 48.0, 0.000, 0.000, 0.000 50.0, 0.000, 0.000, 0.000 52.0, 0.000, 0.000, 0.000 54.0, 0.000, 0.000, 0.000 56.0, 0.000, 0.000, 0.000 58.0, 0.000, 0.000, 0.000 60.0, 0.000, 0.000, 0.000