All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.0, -0.166, 0.746, 0.898
-56.7, -0.167, 0.737, 0.896
-54.4, -0.160, 0.798, 0.803
-51.9, -0.151, 0.818, 0.671
-49.3, -0.139, 0.888, 0.548
-46.6, -0.129, 0.866, 0.254
-43.7, -0.118, 0.913, 0.141
-40.6, -0.109, 0.903, 0.077
-37.5, -0.108, 0.875, 0.014
-34.1, -0.091, 0.883, -0.034
-30.7, -0.083, 0.828, -0.073
-27.1, -0.052, 0.803, -0.101
-23.5, -0.035, 0.679, -0.109
-19.7, -0.001, 0.619, -0.127
-15.9, 0.019, 0.497, -0.150
-12.0, 0.055, 0.434, -0.142
-8.0, 0.094, 0.273, -0.068
-4.0, 0.128, 0.176, -0.002
0.0, 0.143, 0.072, 0.000
0.0, 0.144, -0.030, 0.128
4.0, 0.123, -0.112, 0.209
8.0, 0.122, -0.223, 0.293
12.0, 0.132, -0.376, 0.399
15.9, 0.120, -0.545, 0.462
19.7, 0.115, -0.674, 0.443
23.5, 0.082, -0.782, 0.399
27.1, 0.056, -0.898, 0.360
30.7, 0.014, -0.970, 0.233
34.1, -0.015, -1.040, 0.201
37.5, -0.032, -1.102, 0.176
40.6, -0.023, -1.178, 0.141
43.7, -0.027, -1.166, 0.049
46.6, -0.084, -1.253, 0.001
49.3, -0.137, -1.310, 0.018
51.9, -0.193, -1.312, 0.067
54.4, -0.255, -1.326, 0.113
56.7, -0.331, -1.311, 0.128
58.0, -0.332, -1.298, 0.121

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.0, -0.105, 1.237, 0.000
-56.7, -0.105, 1.237, 0.000
-54.4, -0.098, 1.326, 0.000
-51.9, -0.092, 1.374, 0.000
-49.3, -0.087, 1.424, 0.000
-46.6, -0.085, 1.409, 0.000
-43.7, -0.081, 1.417, 0.000
-40.6, -0.081, 1.363, 0.000
-37.5, -0.082, 1.307, 0.000
-34.1, -0.070, 1.274, 0.000
-30.7, -0.065, 1.132, 0.000
-27.1, -0.036, 1.038, 0.000
-23.5, -0.020, 0.855, 0.000
-19.7, 0.016, 0.733, 0.000
-15.9, 0.036, 0.565, 0.000
-12.0, 0.072, 0.440, 0.000
-8.0, 0.107, 0.287, 0.000
-4.0, 0.128, 0.166, 0.000
0.0, 0.143, 0.072, 0.000
0.0, 0.235, -0.014, 0.000
4.0, 0.210, -0.062, 0.000
8.0, 0.211, -0.117, 0.000
12.0, 0.222, -0.172, 0.000
15.9, 0.212, -0.270, 0.000
19.7, 0.207, -0.225, 0.000
23.5, 0.173, -0.211, 0.000
27.1, 0.149, -0.229, 0.000
30.7, 0.103, -0.251, 0.000
34.1, 0.068, -0.274, 0.000
37.5, 0.044, -0.299, 0.000
40.6, 0.031, -0.339, 0.000
43.7, -0.009, -0.381, 0.000
46.6, -0.098, -0.467, 0.000
49.3, -0.152, -0.527, 0.000
51.9, -0.206, -0.580, 0.000
54.4, -0.266, -0.604, 0.000
56.7, -0.338, -0.622, 0.000
58.0, -0.338, -0.622, 0.000