All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-51.9, -0.154, -0.202, 0.671
-49.3, -0.147, -0.199, 0.549
-46.6, -0.159, -0.133, 0.254
-43.7, -0.180, -0.080, 0.141
-40.6, -0.205, -0.007, 0.077
-37.5, -0.209, 0.063, 0.014
-34.1, -0.227, 0.112, -0.034
-30.7, -0.210, 0.198, -0.073
-27.1, -0.202, 0.211, -0.101
-23.5, -0.177, 0.241, -0.109
-19.7, -0.140, 0.180, -0.127
-15.9, -0.118, 0.128, -0.150
-12.0, -0.079, 0.167, -0.142
-8.0, -0.035, 0.066, -0.068
-4.0, 0.019, 0.012, -0.002
0.0, 0.045, 0.041, 0.000
0.0, 0.233, -0.013, 0.128
4.0, 0.204, -0.027, 0.209
8.0, 0.194, -0.043, 0.293
12.0, 0.190, -0.097, 0.399
15.9, 0.172, -0.133, 0.461
19.7, 0.152, -0.160, 0.443
23.5, 0.114, -0.143, 0.399
27.1, 0.099, -0.157, 0.360
30.7, 0.070, -0.156, 0.233
34.1, 0.054, -0.151, 0.201
37.5, 0.066, -0.146, 0.176
40.6, 0.096, -0.155, 0.141
43.7, 0.125, -0.097, 0.049
46.6, 0.098, -0.129, 0.001
49.3, 0.076, -0.165, 0.018
51.9, 0.046, -0.128, 0.067
54.4, 0.018, -0.093, 0.113
56.7, -0.035, -0.056, 0.128
58.9, -0.035, -0.027, 0.105

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-51.9, -0.095, 0.337, 0.000
-49.3, -0.095, 0.337, 0.000
-46.6, -0.115, 0.392, 0.000
-43.7, -0.144, 0.443, 0.000
-40.6, -0.176, 0.453, 0.000
-37.5, -0.183, 0.495, 0.000
-34.1, -0.205, 0.503, 0.000
-30.7, -0.192, 0.502, 0.000
-27.1, -0.186, 0.458, 0.000
-23.5, -0.162, 0.417, 0.000
-19.7, -0.124, 0.319, 0.000
-15.9, -0.101, 0.209, 0.000
-12.0, -0.062, 0.173, 0.000
-8.0, -0.022, 0.080, 0.000
-4.0, 0.020, 0.015, 0.000
0.0, 0.045, 0.054, 0.000
0.0, 0.324, 0.031, 0.000
4.0, 0.291, 0.038, 0.000
8.0, 0.283, 0.065, 0.000
12.0, 0.280, 0.110, 0.000
15.9, 0.264, 0.143, 0.000
19.7, 0.243, 0.305, 0.000
23.5, 0.206, 0.430, 0.000
27.1, 0.192, 0.516, 0.000
30.7, 0.159, 0.589, 0.000
34.1, 0.138, 0.629, 0.000
37.5, 0.142, 0.672, 0.000
40.6, 0.150, 0.689, 0.000
43.7, 0.142, 0.713, 0.000
46.6, 0.084, 0.681, 0.000
49.3, 0.060, 0.632, 0.000
51.9, 0.033, 0.619, 0.000
54.4, 0.007, 0.636, 0.000
56.7, -0.042, 0.647, 0.000
58.9, -0.042, 0.647, 0.000