All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, -0.065, 0.321, 0.859
-56.7, -0.072, 0.333, 0.897
-54.4, -0.066, 0.394, 0.804
-51.9, -0.066, 0.399, 0.671
-49.3, -0.069, 0.462, 0.548
-46.6, -0.087, 0.427, 0.254
-43.7, -0.080, 0.502, 0.141
-40.6, -0.094, 0.484, 0.077
-37.5, -0.100, 0.511, 0.014
-34.1, -0.106, 0.516, -0.034
-30.7, -0.091, 0.532, -0.073
-27.1, -0.089, 0.507, -0.101
-23.5, -0.067, 0.499, -0.109
-19.7, -0.057, 0.404, -0.127
-15.9, -0.033, 0.368, -0.150
-12.0, -0.008, 0.215, -0.142
-8.0, 0.016, 0.111, -0.068
-4.0, 0.044, 0.014, -0.002
0.0, -0.001, -0.076, 0.000
0.0, 0.170, -0.205, 0.128
4.0, 0.152, -0.268, 0.209
8.0, 0.163, -0.408, 0.293
12.0, 0.160, -0.528, 0.399
15.9, 0.172, -0.664, 0.462
19.7, 0.168, -0.754, 0.443
23.5, 0.169, -0.866, 0.399
27.1, 0.156, -0.932, 0.360
30.7, 0.158, -1.028, 0.234
34.1, 0.160, -1.117, 0.201
37.5, 0.193, -1.184, 0.176
40.6, 0.248, -1.250, 0.142
43.7, 0.300, -1.247, 0.049
46.6, 0.290, -1.346, 0.001
49.3, 0.282, -1.423, 0.018
51.9, 0.267, -1.490, 0.067
54.4, 0.249, -1.549, 0.113
56.7, 0.245, -1.516, 0.128

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, -0.010, 0.833, 0.000
-56.7, -0.010, 0.833, 0.000
-54.4, -0.004, 0.914, 0.000
-51.9, -0.007, 0.955, 0.000
-49.3, -0.017, 0.990, 0.000
-46.6, -0.044, 0.961, 0.000
-43.7, -0.043, 0.996, 0.000
-40.6, -0.065, 0.943, 0.000
-37.5, -0.074, 0.933, 0.000
-34.1, -0.084, 0.907, 0.000
-30.7, -0.072, 0.835, 0.000
-27.1, -0.073, 0.766, 0.000
-23.5, -0.052, 0.663, 0.000
-19.7, -0.041, 0.530, 0.000
-15.9, -0.016, 0.424, 0.000
-12.0, 0.009, 0.247, 0.000
-8.0, 0.029, 0.125, 0.000
-4.0, 0.044, -0.010, 0.000
0.0, -0.001, -0.063, 0.000
0.0, 0.261, -0.162, 0.000
4.0, 0.239, -0.231, 0.000
8.0, 0.252, -0.301, 0.000
12.0, 0.250, -0.350, 0.000
15.9, 0.264, -0.390, 0.000
19.7, 0.259, -0.316, 0.000
23.5, 0.261, -0.296, 0.000
27.1, 0.249, -0.274, 0.000
30.7, 0.247, -0.298, 0.000
34.1, 0.243, -0.341, 0.000
37.5, 0.269, -0.380, 0.000
40.6, 0.303, -0.421, 0.000
43.7, 0.317, -0.462, 0.000
46.6, 0.276, -0.551, 0.000
49.3, 0.266, -0.649, 0.000
51.9, 0.254, -0.757, 0.000
54.4, 0.238, -0.835, 0.000
56.7, 0.238, -0.835, 0.000