All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, -0.240, -0.056, 0.859
-56.7, -0.247, -0.050, 0.897
-54.4, -0.257, -0.026, 0.804
-51.9, -0.245, 0.027, 0.671
-49.3, -0.241, 0.082, 0.548
-46.6, -0.229, 0.103, 0.254
-43.7, -0.227, 0.135, 0.141
-40.6, -0.201, 0.200, 0.077
-37.5, -0.196, 0.200, 0.014
-34.1, -0.173, 0.266, -0.034
-30.7, -0.167, 0.256, -0.073
-27.1, -0.137, 0.288, -0.101
-23.5, -0.112, 0.216, -0.109
-19.7, -0.079, 0.171, -0.127
-15.9, -0.066, 0.078, -0.150
-12.0, -0.037, 0.038, -0.142
-8.0, -0.009, -0.091, -0.068
-4.0, 0.020, -0.193, -0.002
0.0, 0.011, -0.234, 0.000
0.0, -0.041, -0.281, 0.128
4.0, -0.047, -0.373, 0.209
8.0, -0.054, -0.449, 0.293
12.0, -0.039, -0.563, 0.399
15.9, -0.046, -0.641, 0.462
19.7, -0.038, -0.714, 0.443
23.5, -0.051, -0.793, 0.399
27.1, -0.054, -0.851, 0.360
30.7, -0.064, -0.903, 0.234
34.1, -0.055, -0.964, 0.201
37.5, -0.024, -1.040, 0.176
40.6, 0.025, -1.064, 0.142
43.7, 0.068, -1.031, 0.048
46.6, 0.058, -1.133, 0.001
49.3, 0.048, -1.182, 0.018
51.9, 0.030, -1.199, 0.067
54.4, 0.010, -1.239, 0.113
56.7, 0.006, -1.206, 0.128

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, -0.184, 0.449, 0.000
-56.7, -0.184, 0.449, 0.000
-54.4, -0.195, 0.510, 0.000
-51.9, -0.187, 0.566, 0.000
-49.3, -0.189, 0.627, 0.000
-46.6, -0.185, 0.628, 0.000
-43.7, -0.190, 0.658, 0.000
-40.6, -0.172, 0.659, 0.000
-37.5, -0.170, 0.633, 0.000
-34.1, -0.152, 0.635, 0.000
-30.7, -0.149, 0.560, 0.000
-27.1, -0.121, 0.524, 0.000
-23.5, -0.096, 0.380, 0.000
-19.7, -0.062, 0.298, 0.000
-15.9, -0.049, 0.146, 0.000
-12.0, -0.021, 0.057, 0.000
-8.0, 0.004, -0.078, 0.000
-4.0, 0.020, -0.203, 0.000
0.0, 0.011, -0.221, 0.000
0.0, 0.050, -0.259, 0.000
4.0, 0.040, -0.303, 0.000
8.0, 0.035, -0.349, 0.000
12.0, 0.051, -0.352, 0.000
15.9, 0.046, -0.359, 0.000
19.7, 0.054, -0.245, 0.000
23.5, 0.041, -0.216, 0.000
27.1, 0.039, -0.186, 0.000
30.7, 0.025, -0.177, 0.000
34.1, 0.028, -0.202, 0.000
37.5, 0.052, -0.219, 0.000
40.6, 0.079, -0.228, 0.000
43.7, 0.085, -0.239, 0.000
46.6, 0.044, -0.331, 0.000
49.3, 0.033, -0.400, 0.000
51.9, 0.017, -0.475, 0.000
54.4, -0.001, -0.510, 0.000
56.7, -0.001, -0.510, 0.000