All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, -0.016, 0.507, 0.859
-56.7, -0.023, 0.506, 0.896
-54.4, -0.039, 0.555, 0.803
-51.9, -0.053, 0.558, 0.671
-49.3, -0.075, 0.591, 0.548
-46.6, -0.119, 0.513, 0.254
-43.7, -0.136, 0.522, 0.141
-40.6, -0.151, 0.532, 0.077
-37.5, -0.154, 0.533, 0.014
-34.1, -0.157, 0.528, -0.034
-30.7, -0.148, 0.492, -0.073
-27.1, -0.132, 0.420, -0.101
-23.5, -0.099, 0.337, -0.109
-19.7, -0.056, 0.219, -0.127
-15.9, -0.036, 0.110, -0.150
-12.0, -0.007, 0.004, -0.142
-8.0, 0.026, -0.099, -0.068
-4.0, 0.057, -0.177, -0.002
0.0, 0.054, -0.290, 0.000
0.0, 0.400, -0.267, 0.128
4.0, 0.376, -0.358, 0.209
8.0, 0.369, -0.491, 0.293
12.0, 0.362, -0.645, 0.399
15.9, 0.352, -0.782, 0.461
19.7, 0.340, -0.881, 0.443
23.5, 0.318, -1.001, 0.399
27.1, 0.295, -1.119, 0.360
30.7, 0.276, -1.224, 0.233
34.1, 0.254, -1.308, 0.201
37.5, 0.281, -1.397, 0.176
40.6, 0.315, -1.472, 0.141
43.7, 0.347, -1.496, 0.049
46.6, 0.324, -1.581, 0.001
49.3, 0.292, -1.647, 0.018
51.9, 0.227, -1.636, 0.067
54.4, 0.185, -1.639, 0.113
56.7, 0.142, -1.666, 0.128
58.0, 0.140, -1.660, 0.121

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, 0.039, 1.005, 0.000
-56.7, 0.039, 1.005, 0.000
-54.4, 0.023, 1.075, 0.000
-51.9, 0.005, 1.097, 0.000
-49.3, -0.023, 1.119, 0.000
-46.6, -0.076, 1.047, 0.000
-43.7, -0.099, 1.044, 0.000
-40.6, -0.122, 1.001, 0.000
-37.5, -0.128, 0.955, 0.000
-34.1, -0.136, 0.908, 0.000
-30.7, -0.130, 0.796, 0.000
-27.1, -0.116, 0.667, 0.000
-23.5, -0.084, 0.501, 0.000
-19.7, -0.040, 0.345, 0.000
-15.9, -0.019, 0.191, 0.000
-12.0, 0.010, 0.036, 0.000
-8.0, 0.038, -0.099, 0.000
-4.0, 0.057, -0.200, 0.000
0.0, 0.054, -0.277, 0.000
0.0, 0.491, -0.237, 0.000
4.0, 0.464, -0.307, 0.000
8.0, 0.458, -0.384, 0.000
12.0, 0.452, -0.440, 0.000
15.9, 0.444, -0.494, 0.000
19.7, 0.431, -0.430, 0.000
23.5, 0.410, -0.429, 0.000
27.1, 0.388, -0.447, 0.000
30.7, 0.365, -0.468, 0.000
34.1, 0.337, -0.529, 0.000
37.5, 0.356, -0.569, 0.000
40.6, 0.369, -0.639, 0.000
43.7, 0.365, -0.688, 0.000
46.6, 0.310, -0.772, 0.000
49.3, 0.276, -0.850, 0.000
51.9, 0.214, -0.898, 0.000
54.4, 0.174, -0.927, 0.000
56.7, 0.134, -0.971, 0.000
58.0, 0.134, -0.971, 0.000