All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, 0.068, 0.114, 0.859
-56.7, 0.061, 0.119, 0.897
-54.4, 0.022, 0.169, 0.804
-51.9, 0.005, 0.223, 0.671
-49.3, -0.017, 0.283, 0.549
-46.6, -0.071, 0.267, 0.254
-43.7, -0.101, 0.290, 0.141
-40.6, -0.140, 0.309, 0.077
-37.5, -0.163, 0.334, 0.014
-34.1, -0.166, 0.393, -0.034
-30.7, -0.166, 0.374, -0.073
-27.1, -0.153, 0.413, -0.101
-23.5, -0.147, 0.344, -0.109
-19.7, -0.125, 0.299, -0.127
-15.9, -0.114, 0.204, -0.150
-12.0, -0.088, 0.172, -0.142
-8.0, -0.059, 0.055, -0.068
-4.0, -0.030, -0.006, -0.002
0.0, -0.014, -0.083, 0.000
0.0, 0.402, -0.029, 0.128
4.0, 0.366, -0.077, 0.209
8.0, 0.361, -0.175, 0.293
12.0, 0.356, -0.282, 0.399
15.9, 0.341, -0.381, 0.462
19.7, 0.324, -0.464, 0.443
23.5, 0.307, -0.566, 0.399
27.1, 0.295, -0.684, 0.360
30.7, 0.274, -0.745, 0.233
34.1, 0.264, -0.812, 0.200
37.5, 0.283, -0.869, 0.176
40.6, 0.325, -0.919, 0.141
43.7, 0.362, -0.920, 0.048
46.6, 0.343, -0.997, 0.001
49.3, 0.300, -1.041, 0.018
51.9, 0.271, -1.060, 0.067
54.4, 0.240, -1.115, 0.113
56.7, 0.237, -1.082, 0.128

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-58.9, 0.123, 0.619, 0.000
-56.7, 0.123, 0.619, 0.000
-54.4, 0.084, 0.705, 0.000
-51.9, 0.064, 0.762, 0.000
-49.3, 0.035, 0.819, 0.000
-46.6, -0.028, 0.784, 0.000
-43.7, -0.064, 0.803, 0.000
-40.6, -0.111, 0.768, 0.000
-37.5, -0.137, 0.766, 0.000
-34.1, -0.144, 0.773, 0.000
-30.7, -0.148, 0.689, 0.000
-27.1, -0.137, 0.648, 0.000
-23.5, -0.132, 0.508, 0.000
-19.7, -0.108, 0.413, 0.000
-15.9, -0.097, 0.272, 0.000
-12.0, -0.071, 0.191, 0.000
-8.0, -0.047, 0.056, 0.000
-4.0, -0.030, -0.016, 0.000
0.0, -0.014, -0.069, 0.000
0.0, 0.492, 0.007, 0.000
4.0, 0.453, -0.020, 0.000
8.0, 0.450, -0.061, 0.000
12.0, 0.446, -0.084, 0.000
15.9, 0.433, -0.099, 0.000
19.7, 0.416, -0.007, 0.000
23.5, 0.399, -0.001, 0.000
27.1, 0.387, -0.019, 0.000
30.7, 0.363, -0.007, 0.000
34.1, 0.347, -0.039, 0.000
37.5, 0.359, -0.048, 0.000
40.6, 0.379, -0.092, 0.000
43.7, 0.379, -0.118, 0.000
46.6, 0.329, -0.203, 0.000
49.3, 0.284, -0.251, 0.000
51.9, 0.258, -0.328, 0.000
54.4, 0.229, -0.393, 0.000
56.7, 0.229, -0.393, 0.000