All shifts are given in stage coordinates.
1) Total applied shifts:

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-46.6, -0.194, 0.384, 0.254
-43.7, -0.187, 0.396, 0.141
-40.6, -0.158, 0.412, 0.077
-37.5, -0.151, 0.379, 0.014
-34.1, -0.132, 0.390, -0.034
-30.7, -0.121, 0.336, -0.073
-27.1, -0.093, 0.354, -0.101
-23.5, -0.080, 0.284, -0.109
-19.7, -0.047, 0.229, -0.127
-15.9, -0.038, 0.133, -0.150
-12.0, -0.012, 0.100, -0.142
-8.0, 0.010, -0.026, -0.068
-4.0, 0.034, -0.135, -0.002
0.0, 0.011, -0.197, 0.000
0.0, -0.069, -0.057, 0.128
4.0, -0.078, -0.204, 0.209
8.0, -0.078, -0.319, 0.293
12.0, -0.066, -0.463, 0.399
15.9, -0.065, -0.587, 0.462
19.7, -0.058, -0.710, 0.443
23.5, -0.064, -0.800, 0.399
27.1, -0.058, -0.902, 0.360
30.7, -0.062, -0.953, 0.234
34.1, -0.053, -1.013, 0.201
37.5, -0.021, -1.077, 0.176
40.6, 0.036, -1.122, 0.142
43.7, 0.091, -1.117, 0.049
46.6, 0.089, -1.206, 0.001
49.3, 0.084, -1.269, 0.018
51.9, 0.081, -1.319, 0.067
54.4, 0.076, -1.308, 0.113
56.0, 0.075, -1.309, 0.123

2)Excess shifts that are applied by tracking and focusing or manual interaction

Angle[°], Shift dX[µm], Shift dY[µm], Defocus[µm]
-46.6, -0.150, 0.910, 0.000
-43.7, -0.150, 0.910, 0.000
-40.6, -0.129, 0.871, 0.000
-37.5, -0.126, 0.812, 0.000
-34.1, -0.110, 0.770, 0.000
-30.7, -0.102, 0.650, 0.000
-27.1, -0.077, 0.601, 0.000
-23.5, -0.065, 0.448, 0.000
-19.7, -0.030, 0.356, 0.000
-15.9, -0.021, 0.201, 0.000
-12.0, 0.004, 0.119, 0.000
-8.0, 0.023, -0.026, 0.000
-4.0, 0.034, -0.158, 0.000
0.0, 0.011, -0.184, 0.000
0.0, 0.022, -0.034, 0.000
4.0, 0.009, -0.134, 0.000
8.0, 0.011, -0.206, 0.000
12.0, 0.024, -0.265, 0.000
15.9, 0.027, -0.305, 0.000
19.7, 0.033, -0.241, 0.000
23.5, 0.028, -0.234, 0.000
27.1, 0.035, -0.226, 0.000
30.7, 0.027, -0.227, 0.000
34.1, 0.030, -0.229, 0.000
37.5, 0.055, -0.266, 0.000
40.6, 0.090, -0.286, 0.000
43.7, 0.108, -0.315, 0.000
46.6, 0.075, -0.403, 0.000
49.3, 0.068, -0.488, 0.000
51.9, 0.068, -0.572, 0.000
54.4, 0.065, -0.587, 0.000
56.0, 0.065, -0.587, 0.000