300kv
Cs = 2.7mm

nanoprobe, 81000x, slit 20ev, k3, superresolution
1.068A/physical pix.
18 e/physical pix/s.
spot 5, c2 aperture 50, objective aperture 100um,
illuminated area 1.25um,
IS 4holes

3.8 sec exposure, 0.1 sec /fraction